Product Details
Flow sensors / controllers
Flow sensor for compressed air (Display separated FLUEREX)
- Model No.
- PFD
Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.
- Industry
- Sensor
- Semiconductor manufacturing process (post-process)
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[Broad flow rate range]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
400 to 8000 ℓ/min
800 to 16000 ℓ/min
0.8 to 16 m3/min
[Accumulated flow calculation function]
Since integrated display and integrated pulse output are possible, it is ideal for measuring the consumption flow rate of equipment.
| Model No. | Product name | Flow rate range (L/min) | Port size (Rc) | Remarks |
|---|---|---|---|---|
| PFD-501 | Flow sensor for compressed air (Display separated type) | 25 to 500 | 3/8 | |
| PFD-102 | Flow sensor for compressed air | 50 to 1000 | 1/2 | |
| PFD-202 | Flow sensor for compressed air | 100 to 2000 | 3/4 | |
| PFD-402 | Flow sensor for compressed air | 200 to 4000 | 1 | |
| PFD-802 | Flow sensor for compressed air | 400 to 8000 | 1 1/2 | |
| PFD-163 | Flow sensor for compressed air | 800 to 16000 | 2 |
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