Product Details

Flow sensors / controllers

Flow sensor for compressed air (Display separated FLUEREX)

Model No.
PFD

Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
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  • Features
  • Variations

[Broad flow rate range]
25 to 500 ℓ/min
50 to 1000 ℓ/min
100 to 2000 ℓ/min
200 to 4000 ℓ/min
400 to 8000 ℓ/min
800 to 16000 ℓ/min
0.8 to 16 m3/min

[Accumulated flow calculation function]
Since integrated display and integrated pulse output are possible, it is ideal for measuring the consumption flow rate of equipment.

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