Product Details
Electro pneumatic regulators
Digital electro pneumatic regulator
- Model No.
- EVD
Compact, high-function electro pneumatic regulator featuring easily used functions such as pressure and error display function and direct memory function.
- Industry
- Semiconductor manufacturing process (post-process)
- Special purpose / conveyance
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[IO-Link compatible]
IO-Link communication enables remote operation from the host, in addition to data collection.
[Predictive maintenance]
Operation status can be monitored.
[With digital display]
Digital display mounted to make control status visible at a glance.
[Modular connection]
Module connection to filter / regulator is possible.
[High precision / high-speed response]
Linearity: ±0.3%F.S.
Hysteresis: 0.5% F.S.
Response time: 0.2 sec
[Preset input function]
Up to 8 channels of pressure can be stored in the body and switched by external signals.
[Direct memory function]
External input signal is not required.
Product operation keys can be used to arbitrarily adjust the secondary pressure value.
Model No. | Product name | Max. flow rate (L/min) | Pressure range (kPa) | Remarks |
---|---|---|---|---|
EVD-1000 | Digital electro pneumatic regulator | 60 to 400 | 0 to 900 | |
EVD-3000 | Digital electro pneumatic regulator | 700 to 1500 | 0 to 900 |
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