Product List

Product List

Out of 14 items,
item No. 1 to 10

Flow sensors / controllers

Compact Flow Rate Sensor RAPIFLOW®

Model No.
FSM3

NEW

【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…

Industry
  • Shield gas
  • Semiconductor manufacturing process (post-process)
  • N2 purging related products

Flow sensors / controllers

Karman Vortex Flow Sensor FLUEREX

Model No.
WFK2

NEW

Received the 2018 Good Design Award.
Karman vortex flow sensor that covers 0.4 to 250 L/min. Switch setting for vario…

Industry
  • Physicochemical analysis equipment

Flow sensors / controllers

Compact flow rate controller RAPIFLOW®

Model No.
FCM

NEW

It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…

Industry
  • Shield gas
  • N2 purging related products
  • Physicochemical analysis equipment

Flow sensors / controllers

Capacitance electromagnetic flow sensor

Model No.
WFC

Flow rate sensor with Flo-Thru structure. No clogging of foreign matter or detection error will occur. It is ideal for s…

Industry
  • Cooling water
  • Environmental durability
  • Coolant control

Related products for water

Integrated unit for water control

Model No.
WXU

Integrated unit that integrates the flow sensor and valve in cooling water circulation circuits. It greatly reduces the …

Industry
  • Physicochemical analysis equipment
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

CKD plus Members Only

Flow sensors / controllers

Compact flow rate sensor for gas RAPIFLOW®

Model No.
FSM2

Discontinued some variations

【Discontinued model】
Alternative model : FSM3 Series
*Separated display FSM2-D Series is still on sale.

A s…

Industry
  • Shield gas
  • Inspection
  • Physicochemical analysis equipment

Flow sensors / controllers

Miniature flow rate sensor for gas RAPIFLOW®

Model No.
FSM

Discontinued some variations

Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the …

Industry
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Flow sensors / controllers

Karman vortex flow rate sensor for water FLUEREX

Model No.
WFK3000

Karman vortex detection flow rate sensor for water. A compact and simple design suitable for mounting to equipment.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
  • Physicochemical analysis equipment

Flow sensors / controllers

Flow sensor for compressed air (Display separated FLUEREX)

Model No.
PFD

Separated display type pneumatic flow rate sensor.
It is ideal for large flow rate measurement.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

PDF Catalog

Safety Precautions

User's Manual

2D CAD

3D CAD

CKD plus Members Only

Flow sensors / controllers

Flow sensor tester kit for gas

Model No.
PFK

Discontinued some variations

Equipment for measuring the air flow rate is provided as a kit. Enables immediate measurements on site.

Industry
  • Sensor
  • Semiconductor manufacturing process (post-process)
Documents / Download

Digital Catalog

PDF Catalog

Safety Precautions

User's Manual

CKD plus Members Only