Product List

Product List

Out of 10 items,
item No. 1 to 10

Process gas components

Valve for process gas

Model No.
LGD

A new variation of valve for process gas that uses a metal diaphragm.
It has been released as a general-purpose prod…

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Air operated valve

Model No.
AGD

Standard valve for process gas that uses a metal diaphragm.
It supports many variations such as 3-way valves and 2-s…

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Manual valve for process gas

Model No.
OGD

90° rotation snap action manual valve.

Industry
  • Components for chemical gas supply facilities
  • Components for chemical liquid supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Manual valve for process gas

Model No.
MGD

Manual metal diaphragm valve. A 270° rotating handle opening/closing type.

Industry
  • Components for chemical liquid supply facilities
  • Components for chemical gas supply facilities
  • Semiconductor manufacturing process (pre-process)
  • N2 purging related products

Process gas components

Vacuum generator

Model No.
VG

Energy saving vacuum exhaust equipment. Vacuum generator for process gas exhaust.
Nozzle diameter: φ0.5

Industry
  • Components for chemical gas supply facilities
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Digital Catalog

PDF Catalog

Safety Precautions

2D CAD

3D CAD

CKD plus Members Only

Process gas components

Manual valve for process gas

Model No.
MGD10V・MGD10V

Discontinued 2011 09 30

【Discontinued model】
Alternative model : Manual valve for process gas MGD Series

Industry
Documents / Download

PDF Catalog

CKD plus Members Only

Process gas components

Manual valve for process gas

Model No.
OGD10V・OGD20V

Discontinued 2011 09 30

【Discontinued model】
Alternative model : Manual valve for process gas OGD Series

Industry
Documents / Download

PDF Catalog

CKD plus Members Only

Process gas components

Air operated valve for process gas

Model No.
AGD※※V

Discontinued 2011 09 30

【Discontinued model】
Alternative model : Air operated valve AGD Series

Industry
Documents / Download

PDF Catalog

CKD plus Members Only

Process gas components

Air operated valve for process gas

Model No.
AGD11・AGD12

Discontinued 2005 09 30

【Discontinued model】
Alternative model : Air operated valve AGD Series

Industry
Documents / Download

PDF Catalog

User's Manual

CKD plus Members Only

Process gas components

Vacuum burst valve

Model No.
FGL

Discontinued 2008 09 30

【Discontinued model】

Industry
Documents / Download

PDF Catalog

CKD plus Members Only

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