Product Details

Direct acting 3-port solenoid valves

Direct acting 3-port valve

Model No.
3QR・3QB・3QE・3QZ

Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
air blow, etc.)
3QE / Z Series for positive pressure only,
3QB Series for positive and negative pressure,
3QR Series with large flow rate for positive and negative pressure.
[Cylinder bore size: φ6 to φ20]

Industry
  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)
  • Oxygen concentrator
  • Dialysis monitoring equipment
  • Dental equipment

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  • Features
  • Variations

[Environmental performance] (3QE / 3QZ Series)  
In addition to high durability, stable responsiveness is realized by prevention of malfunction and snagging due to foreign matter.
Suppresses heat generation and reduces electricity.

[Maintainability] (3QE / 3QZ Series)
Upward/lateral common wiring connector and manual override realize ease of use and high maintainability.
Enables continuous energization. (Option)

[Compact and lightweight] (3QB Series)
Valve width 10 mm.
Weight 12.5 g.

[3QB low vacuum, positive pressure switching] (3QB Series)
Low vacuum and positive pressure can be freely combined.
Can be customized.

[High performance] (3QR Series)
Universal structure.
Selectable flow rate.
Large flow rate 0.4 d㎥/(s/bar)
Standard: 0.3 d㎥/(s/bar)
High response: 4 ±1 ms / 1.5 ±1 ms (ON/OFF).

Model No. Product name Piping port positionPort size Remarks
3QEPositive pressure dedicated Single unitBase side pipingM5
3QBPositive / negative pressure switching, large flow rate Single unitBase side pipingM5
3QRAPositive / negative pressure switching, large flow rate Single unitBody pipingM5
3QRBPositive / negative pressure switching, large flow rate Single unitBase side pipingM5
M3QEPositive pressure dedicated Individual wiring manifoldBase side pipingM5
M3QZPositive pressure dedicated Individual wiring manifoldBase rear pipingM5
M3QBPositive pressure dedicated Individual wiring manifoldBase side pipingM5
M3QRAPositive / negative pressure switching, large flow rate Individual wiring manifoldBody pipingM5, Rc1/8
M3QRBPositive / negative pressure switching, large flow rate Individual wiring manifoldBase side pipingM5, Rc1/8

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