| Component for process gas/high components for vacuum |
| For more detailed information, click the model No. of each product. |
| Air operated valve
for process gas |
Air operated valve used as ON/OFF
of high purity gas in flow control devices for semiconductor and LCD manufacturing
etc.
 |
High performance/high quality necessary for extreme high
purity process gas control. |
|
Appropriate seal structure and increased surface roughness
realize zero particle occurrence. (0.001/cycle or less) |
|
Extreme flat inner surface roughness by electrolytic
polishing. |
|
Options
Block valve, branch valve, valve corresponding to 180°C,
valve with switch. |
|
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 |
| Manual valve for
process gas |
Manual valve used in in flow
control device of high purity process
gas for semiconductor and LCD manufacturing etc.
|
High performance/high quality necessary for extreme high
purity process gas control. |
|
Two types of manual override, open/close dial and one
push lever. |
|
Appropriate seal structure and increased surface roughness
realize zero particle occurrence. |
|
Extreme flat inner surface roughness by electrolytic
polishing. |
|
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|
| Air operated valve
for high vacuum |
Air operated valves used as
ON/OFF of vacuum exhaust air in dry
process devices for semiconductor and LCD manufacturing etc.
|
Long service life formed bellows used air operated valve
for high vacuum. |
|
SUS and aluminum body materials are available. |
|
Easy maintenance.
Easy bellows dismount. |
|
Back pressure use is available.
Either ports can be connected to vacuum pump. |
|
Switch installation is available to confirm operation. |
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|
| Manual valve for
high vacuum |
| For vacuum and inactive gas |
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|
Valve to control vacuum break
time, prevent particles flying in the
chamber and immediately release to atmospheric air.
|
Vacuum break time can be adjusted. |
|
Electromagnetic method but non sliding valve structure
enables zero particle occurrence. |
|
Electromagnetic method but section of flow path is high
corrosion proof more than SUS316L. |
|
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|
| Solenoid valve
for high vacuum |
Solenoid valve for high vacuum
meets various needs from liquid
crystal and braun tube manufacturing, food drying and electron microscope.
|
Wide series variation, orifice 1.6 to 15 mm. |
|
From N2 pressurization to vacuum, maximum working differential
pressure 0.3MPa.
(Specifications differ depending on series. Confirm specifications when selection.) |
|
Appropriate for high vacuum control without air source.
(Consider particle and service life etc.) |
|
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|
| Delay solenoid
valve for vacuum |
Solenoid valve used as vacuum
pump protection, and closed when
de-energized during pump operation, while open after a few minutes from pump
operation stopped.
|
Delay leak function (between 0 and 10 seconds). |
|
Delay time adjustment (setting) is available. |
|
High vacuum sealing. |
|
Orifice, 1.2 and 3.0 mm. |
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