| For more detailed information, click the model No. of each product. |
| Air operated valve
for chemicals |
Air operated valves used as
ON/OFF of high purity chemicals
(including pure water) in the flow control devices for semiconductor and LCD
manufacturing etc.
 |
High performance/high quality systems necessary for extreme
high purity process control. |
|
Wide series variation including small to large size PFA
forming body used air operated valve for chemicals
High reliable fitting (1/8" to 1") is integrated. Flexible selection
of port size, Rc1/8 to Rc1. |
|
Wide fitting variation.
Super Fitting, SUPER 300.
FLOW WELL 20/60, final lock, flared tube fitting etc. |
|
Wide variation
With flow rate adjustment, with by-pass, with indicator etc. |
|
SUS body type is available from small to large size for
solvent and static electricity. |
|
Manifold type is also available for liquid supply system. |
|
Large port size type, PP or PVC material, is also available
for discharge. |
|
Up to 160 °C for high temperature |
|
Special specifications fitting to other controls are
also available. |
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 |
| <Model No> |
| 2 port valve, AMD3*2 |
| 2 port valve, AMD4*2 |
| 2 port valve, AMD5*2 |
| Stainless steel body, 2 port valve, AMD3*22 |
| Stainless steel body, 2 port valve, AMD4*2 |
| Stainless steel body, 2 port valve, AMD5*2 |
| 3 port valve, AMG*02 |
| Manifold, GAMD**2 |
Manual valve used in the flow
control device of high purity
chemicals (including pure water) for semiconductor and LCD manufacturing etc.
|
High quality systems necessary for extreme high purity
process control. |
|
Wide series variation including small to large size PFA
forming used manual valve for chemicals. |
|
Wide fitting variation.
Super Fitting, SUPER 300, FLOW WELL 20/60, Final Lock, Flared Tube Fitting etc. |
|
SUS body type is available from small to large size for
solvent and static electricity. |
|
Manifold type is also available for liquid supply system.
(PTFE body) |
|
Two types of manual override, open/close dial and one
push lever. |
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|
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